Control of Structure and Film Thickness Using Spray Layer-by-Layer Method: Application to Double-Layer Anti-Reflection Film
Control of Structure and Film Thickness Using Spray Layer-by-Layer Method: Application to Double-Layer Anti-Reflection Film
复制标题
逐层喷涂法控制结构和膜厚：在双层增透膜中的应用
DOI：
10.1143/jjap.50.035803
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发表时间：
2011
影响因子：
1.5
通讯作者：
S. Shiratori
中科院分区：
文献类型：
--
作者：
K. Kyung;Kouji Fujimoto;S. Shiratori
近年来发展起来的将溶液喷涂到衬底上，通过逐层（LBL）方法制备薄膜的方法得到了进一步的研究和推广。采用逐层喷涂（spray- lbl）法制备了高、低折射率双层增透薄膜。为制备高折射率层，将聚二烯基二甲基氯化铵（PDDA）层和钛（IV）二氢氧化铵（TALH）层交替组装。测定（PDDA/TALH）的平均厚度为7 nm， 550 nm处折射率为n=1.76。在高折射率层上组装聚丙烯胺盐化（PAH）和聚丙烯酸（PAA）层，形成低折射率层。测定（PAH/PAA）的平均厚度为14 nm， 550 nm处的折射率为n=1.48。该AR薄膜在波长约550 nm处透光率最大，为94.5%，反射率最小，为0.5%。
The recently developed practice of spraying solutions onto a substrate to fabricate thin films via layer-by layer (LBL) method has been further investigated and extended. We successfully fabricated double-layer anti-reflection (AR) thin films with high- and low-refractive-index layers by the spray layer-by-layer (spray-LBL) method. For the deposition of a high-refractive-index layer, layers of poly(diallyldimethylammonium chloride) (PDDA) and titanium(IV) bis(ammoniumlactato) dihydroxide (TALH) were alternatively assembled. The average thickness of (PDDA/TALH) was determined to be 7 nm and the refractive index was n=1.76 at 550 nm. Poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA) layers were assembled on the high-refractive-index layer for the deposition of the low-refractive-index layer. The average thickness of (PAH/PAA) was determined to be 14 nm and the refractive index was n=1.48 at 550 nm. This AR thin film showed the maximum transmittance (94.5%) and the minimum reflection (0.5%) at approximately 550 nm in wavelength.