Crystallization, fluoridation and some properties of apatite thin films prepared through rf-sputtering from CaO-P2O5 glasses.
Crystallization, fluoridation and some properties of apatite thin films prepared through rf-sputtering from CaO-P2O5 glasses.
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CaO-P2O5 玻璃射频溅射制备磷灰石薄膜的结晶、氟化和一些性能。
DOI：
10.1016/s0142-9612(98)00030-1
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发表时间：
1998
期刊：
影响因子：
14
通讯作者：
T. Umegaki
中科院分区：
文献类型：
--
作者：
K. Yamashita;M. Matsuda;T. Arashi;T. Umegaki
使用CaO/P2O5摩尔比为1.50-0.50（远低于羟基磷灰石化学计量值3.3）的磷酸钙玻璃靶材，通过射频溅射和后退火在氧化铝陶瓷基板上制备化学计量羟基磷灰石、非化学计量羟基磷灰石和缺钙羟基磷灰石薄膜。根据目前的结果，绘制了薄膜中 CaO-P2O5 在空气环境中低温下的相图。环境水蒸气对相图有影响：在水蒸气存在下，磷酸三钙变成磷灰石。通过在200℃等低温下对这些磷灰石薄膜进行氟化来制备致密的氟羟基磷灰石薄膜。在本报告中，还显示了由此制备的薄膜的一些功能特性。
Using calcium phosphate glass targets with the CaO/P2O5molar ratios of 1.50–0.50, much lower than the stoichiometric value of 3.3 for hydroxyapatite, thin films of stoichiometric hydroxy-, nonstoichiometric oxyhydroxy- and Ca-deficient oxyhydroxy-apatites were prepared on alumina ceramic substrates by rf-sputtering followed by post-annealing. Based on the present results, a phase diagram for CaO–P2O5at low temperatures in the ambience of air was depicted for thin films. The ambient H2O vapor had an influence on the phase diagram: Tricalcium phosphate was changed to apatite in the presence of H2O vapor. Dense fluorohydroxyapatite thin films were prepared by fluoridation of those apatite thin films at a low temperature such as 200°C. In the present report, some functional properties of thin films thus prepared were also shown.