Femtosecond laser microfabrication of periodic structures using a microlens array
Femtosecond laser microfabrication of periodic structures using a microlens array
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DOI：
10.1007/s00339-004-3108-x
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发表时间：
2005-02-01
影响因子：
2.7
通讯作者：
Misawa, H
中科院分区：
文献类型：
--
作者：
Matsuo, S;Juodkazis, S;Misawa, H
将微透镜阵列（MLA）应用于飞秒激光微加工。对应于MLA中透镜的排列的二维周期性图案通过在玻璃表面上烧蚀来记录。二维周期性图案通过单次曝光记录，而无需扫描激光束或样品，并作为光栅工作。对图形的光学特性和高效率的制作进行了论证和讨论。
A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.