Electrical and mechanical characterization of low temperature co-fired ceramics for high temperature sensor applications
Electrical and mechanical characterization of low temperature co-fired ceramics for high temperature sensor applications
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用于高温传感器应用的低温共烧陶瓷的电气和机械特性
DOI：
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发表时间：
2009
期刊：
影响因子：
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通讯作者：
U. Schmid
中科院分区：
文献类型：
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作者：
C. Bienert;A. Roosen;M. Grosser;M. Ziegler;U. Schmid
为了在陶瓷多层技术中使用具有更好导电性的金属，如Ag、AgPd、Au或Cu，低温共烧陶瓷（LTCC）在900°C以下的温度下进行致密化。致密化机制可以归因于粘性烧结结合玻璃基质的结晶。寿命预测和应用范围的扩展到高温强烈依赖于剩余的非晶相的过渡范围以及最终的结晶产物。由于基于LTCC的多层陶瓷在制造用于微电子和传感器应用的高度集成器件方面越来越受到关注，因此需要更好地了解其在高温下的机械和电气行为。在这项研究中，除了烧结状态的测试产品之外，还研究了四种商业LTCC基板材料，即来自DuPont的DP 951、DP 943、来自Heraeus的CT 800和AHT-01以及来自CeramTec的GC，研究了它们在高达950 °C的温度下的机械和电气性能的温度依赖性。机械表征包括单层基材上的三点弯曲测试。此外，在真空下测定DP 951的表面电阻率随温度的变化（高达500°C）。接下来，将这些结果与通过电感耦合等离子体（ICP）分析确定的玻璃的组成以及通过烧结基材的XRD和DP 951的原位HT-XRD确定的复合材料中明显的结晶产物相关联。从这些商业LTCC产品的调查获得的结果进行了比较，对内部开发的玻璃陶瓷复合材料进行测量，表现出改善的电气性能和良好的温度稳定性。
To make use of metals with improved conductivity like Ag, AgPd, Au or Cu for metallization pastes in ceramic multilayer technology, Low-Temperature Co-fired Ceramics (LTCC) are densified at temperatures below 900°C. The densification mechanism can be attributed to viscous sintering in combination with the crystallization of the glass matrix. Lifetime prediction and extension of the application range to elevated temperatures strongly depend on the transition range of the remaining amorphous phase as well as on the final crystallization products. Due to the fact that multilayer ceramics based on LTCCs are gaining increasing interest in the manufacturing of highly integrated devices for microelectronic and sensor applications, there is the need to establish a better understanding of their mechanical and electrical behaviour in the elevated temperature regime. In this study, four commercial LTCC substrate materials in addition to a test product in the sintered state, namely DP 951, DP 943, both from DuPont, CT 800 and AHT-01, both from Heraeus, and GC from CeramTec were investigated in respect to the temperature dependence of their mechanical and electrical properties up to temperatures of 950 °C. Mechanical characterization included three-point bending tests on single layer substrates. Furthermore, the surface resistivity as a function of temperature up to 500°C was determined under vacuum for DP 951. Next, these results were correlated to the composition of the glasses, determined by inductively coupled plasma (ICP) analysis, as well as the crystallization products apparent in the composites, which were determined by XRD of the sintered substrates and in-situ HT-XRD for DP 951. Results gained from these investigations of the commercial LTCC products were compared to measurements carried out on glass-ceramic composites developed in-house exhibiting improved electrical behaviour and good temperature stability.