Multi-Hollow Plasma Production along Dielectric Plate in Microwave Discharge
Multi-Hollow Plasma Production along Dielectric Plate in Microwave Discharge
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DOI：
10.1143/jjap.46.l1039
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发表时间：
2007-11
影响因子：
1.5
通讯作者：
S. Nakao;H. Sugai
中科院分区：
文献类型：
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作者：
S. Nakao;H. Sugai
狭缝激发表面波等离子体通常是通过微波放电沿沿着介质平板产生的。在本实验中，将平板表面改性，形成许多小直径和浅深度的空洞。结果，在915 MHz放电中观察到来自每个中空中产生的高密度等离子体斑点的强烈的光发射。在高压下（~ 100 Pa），壁面附近的光发射比空腔中心的光发射更强，这是由于局部等离子体共振对微波的吸收。朗缪尔探针测量显示，在高压等离子体密度均匀性的显着改善，以及在下游等离子体密度显着增加。
Slot-excited surface wave plasma is conventionally generated along a flat dielectric plate by microwave discharge. In the present experiment, the plate surface was modified to form many hollows of small diameter and shallow depth. As a result, intense optical emission from high-density plasma spot produced in each hollow was observed in 915 MHz discharge. At high pressures (∼100 Pa), the optical emission becomes more intense near the wall than in the center of the hollow, which is attributed to microwave absorption by local plasma resonance. Langmuir probe measurements revealed dramatic improvement of the plasma density uniformity at high pressures, together with remarkable increase in a downstream plasma density.