Control of Material Transport Through Pulse Shape Manipulation—A Development Toward Designer Pulses
Control of Material Transport Through Pulse Shape Manipulation—A Development Toward Designer Pulses
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通过脉冲形状控制材料传输——设计脉冲的发展
DOI：
10.1109/jstqe.2014.2302441
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发表时间：
2014
影响因子：
4.9
通讯作者：
D. Richardson
中科院分区：
文献类型：
--
作者：
Krste Pangovski;M. Sparkes;A. Cockburn;W. O'Neill;P. Teh;D. Lin;D. Richardson
工业激光器用户可使用的激光系统种类不断增加，为材料目标应用选择正确的激光器通常基于经验评估。具有可调谐时间脉冲形状的工业主振荡器功率放大器系统现已进入市场，在已经拥挤的参数空间中提供了巨大的脉冲参数灵活性。本文提出了一种基于材料响应观测值设计相互作用参数的方法。利用脉冲数字全息术、后处理分析技术和有限差分建模研究了能量和材料输运机制，以了解入射到硅衬底上的各种时间脉冲包络的关键响应机制|1| 1 μ m底物。的时间包络被证明是源项的主要控制参数，确定随后的材料响应和所得到的表面形态。通过直接应用全息成像数据设计的双峰能量桥接的时间脉冲形状被示出，以大大提高表面质量。
The variety of laser systems available to industrial laser users is growing and the choice of the correct laser for a material target application is often based on an empirical assessment. Industrial master oscillator power amplifier systems with tuneable temporal pulse shapes have now entered the market, providing enormous pulse parameter flexibility in an already crowded parameter space. In this paper, an approach is developed to design interaction parameters based on observations of material responses. Energy and material transport mechanisms are studied using pulsed digital holography, post process analysis techniques and finite-difference modelling to understand the key response mechanisms for a variety of temporal pulse envelopes incident on a silicon 〈1|1|1〉 substrate. The temporal envelope is shown to be the primary control parameter of the source term that determines the subsequent material response and the resulting surface morphology. A double peak energy-bridged temporal pulse shape designed through direct application of holographic imaging data is shown to substantially improve surface quality.