Controlling solidification front shape and thermal stress in growing quasi-single-crystal silicon ingots: Process design for seeded directional solidification
Controlling solidification front shape and thermal stress in growing quasi-single-crystal silicon ingots: Process design for seeded directional solidification
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DOI：
10.1016/j.applthermaleng.2015.08.023
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发表时间：
2015-12
影响因子：
6.4
通讯作者：
Lijun Liu;Qinghua Yu;Xiaofang Qi;Wenhan Zhao;Genxiang Zhong
中科院分区：
文献类型：
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作者：
Lijun Liu;Qinghua Yu;Xiaofang Qi;Wenhan Zhao;Genxiang Zhong
为了控制硅锭生长过程中的凝固前沿形状和热应力，减少硅锭周围的小晶粒区，在工业用籽晶定向凝固炉中设计了移动式保温隔板。我们提出了几种移动过程中的分区块的设计。建立了一个包含各种传热形式的瞬态整体传热模型，研究了生长过程中的温度场、凝固前沿的演化和热应力。通过凝固前沿形状与小晶粒区之间的关系对模拟结果进行了验证。结果表明，移动过程对凝固过程中的温度场、凝固前沿形状以及生长过程中的热应力有显著影响。移动隔块设计对控制凝固前沿形状、减少凝固锭周边小晶粒区是可行的。获得了一个良好的移动工艺设计的分隔块，可以同时实现小晶粒区域和低的热应力在凝固锭。
To control the solidification front shape and thermal stress in the growing silicon ingot and reduce the small-grain region at its periphery, a moving insulation partition block was designed in an industrial seeded directional solidification furnace for quasi-single-crystal silicon ingots. We propose several moving process designs of the partition block. A transient global model of heat transfer in which all types of heat transfer are included was established to investigate the thermal field, solidification front evolution, and thermal stress in the growing ingot. Corresponding experiments were conducted to validate the simulation results through the relationship between solidification front shape and the small-grain region. It was found that the moving process can significantly influence the thermal field, solidification front shape, and thermal stress in the growing ingot during the solidification process. The moving partition block design is feasible to control the solidification front shape and reduce the small-grain region at the periphery of the solidified ingot. A favorable moving process design of the partition block was obtained that can simultaneously achieve a small small-grain region and low thermal stress in the solidified ingot.