Takeo Ushiki: "Characterization of electrically active defects at SOI-BOX interface on high-dose SIMOX wafers"9th International Conference on Production Engineering. JSPE No.3. 567-572 (1999)
Takeo Ushiki: "Characterization of electrically active defects at SOI-BOX interface on high-dose SIMOX wafers"9th International Conference on Production Engineering. JSPE No.3. 567-572 (1999)
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Takeo Ushiki:“高剂量 SIMOX 晶圆上 SOI-BOX 界面电活性缺陷的表征”第九届国际生产工程会议。
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