High-resolution, high-throughput imaging with a multibeam scanning electron microscope.
High-resolution, high-throughput imaging with a multibeam scanning electron microscope.
复制标题
DOI：
10.1111/jmi.12224
复制
发表时间：
2015-08
影响因子：
2
通讯作者：
Zeidler D
中科院分区：
文献类型：
--
作者：
Eberle AL;Mikula S;Schalek R;Lichtman J;Tate MLK;Zeidler D
电子-电子相互作用和探测器带宽限制了单束扫描电子显微镜的最大成像速度。我们使用多个电子束在一个单一的列，并检测二次电子在并行增加成像速度接近两个数量级，并展示了从生物脑组织的各种样品的成像半导体晶片。我们的世界和我们的身体在非常小的尺度上的组成一直吸引着人们，使他们寻找方法使其对人眼可见。当光学显微镜在一定的放大倍数下达到其分辨率极限时，电子显微镜可以超越。但是，它们可视化极小特征的能力是以非常小的视野为代价的。今天，研究人员试图回答的一些问题涉及大脑、骨骼或计算机芯片的超细结构。用电子显微镜捕捉这些物体需要大量的时间--甚至可能超过人类的时间跨度--或者用新的工具来做这项工作要快得多。一种新型的扫描电子显微镜用61束电子束平行扫描，在传统的扫描电子显微镜捕获这些图像之一的同时获得样品的61个相邻图像。原则上，多束扫描电子显微镜的视野是61倍，因此可以在更短的时间内完成样品表面的覆盖。这使研究人员能够考虑大型项目，例如在相当新的连接组学领域。在哈佛大学的课程材料中可以找到一个很好的介绍，以纳米分辨率成像大脑，网址是http://www.mcb80x.org/#，标题为“连接组学”。
Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers. The composition of our world and our bodies on the very small scale has always fascinated people, making them search for ways to make this visible to the human eye. Where light microscopes reach their resolution limit at a certain magnification, electron microscopes can go beyond. But their capability of visualizing extremely small features comes at the cost of a very small field of view. Some of the questions researchers seek to answer today deal with the ultrafine structure of brains, bones or computer chips. Capturing these objects with electron microscopes takes a lot of time – maybe even exceeding the time span of a human being – or new tools that do the job much faster. A new type of scanning electron microscope scans with 61 electron beams in parallel, acquiring 61 adjacent images of the sample at the same time a conventional scanning electron microscope captures one of these images. In principle, the multibeam scanning electron microscope’s field of view is 61 times larger and therefore coverage of the sample surface can be accomplished in less time. This enables researchers to think about large-scale projects, for example in the rather new field of connectomics. A very good introduction to imaging a brain at nanometre resolution can be found within course material from Harvard University on http://www.mcb80x.org/# as featured media entitled ‘connectomics’.