Restructuring in block copolymer thin films: In situ GISAXS investigations during solvent vapor annealing
Restructuring in block copolymer thin films: In situ GISAXS investigations during solvent vapor annealing
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DOI：
10.1016/j.progpolymsci.2016.09.009
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发表时间：
2017-03
影响因子：
27.1
通讯作者：
D. Posselt;Jianqi Zhang;D. Smilgies;A. V. Berezkin;I. Potemkin;C. Papadakis
中科院分区：
文献类型：
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作者：
D. Posselt;Jianqi Zhang;D. Smilgies;A. V. Berezkin;I. Potemkin;C. Papadakis
嵌段共聚物（BCP）薄膜已被提出用于许多纳米技术应用，如纳米光刻、纳米模板、纳米孔膜和传感器。溶剂蒸汽退火（SVA）已经成为一种强大的技术来操纵和控制BCP薄膜的结构，例如，通过修复缺陷，通过改变微畴的取向和通过改变形貌。掠入射小角度x射线散射（GISAXS）由于具有高时间分辨率和与SVA环境的兼容性，是研究SVA过程不可缺少的技术，可以提供BCP薄膜横向和沿膜法向的结构信息。特别是，在同步加速器源上最先进的GISAXS/SVA组合装置促进了SVA过程的现场和实时研究，时间分辨率为几秒，为SVA诱导重组的途径和机制提供了重要的见解。本文简要介绍了GISAXS方法，综述了最近的理论研究、实验技术（如样品制备和原位室）以及SVA方案，并对实验结果进行了回顾和讨论。最后，我们展望了原位实时GISAXS散射技术的新发展，以及利用SVA控制BCP薄膜结构的新方法。
Block copolymer (BCP) thin films have been proposed for a number of nanotechnology applications, such as nanolithography and as nanotemplates, nanoporous membranes and sensors. Solvent vapor annealing (SVA) has emerged as a powerful technique for manipulating and controlling the structure of BCP thin films, e.g., by healing defects, by altering the orientation of the microdomains and by changing the morphology. Due to high time resolution and compatibility with SVA environments, grazing-incidence small-angle X-ray scattering (GISAXS) is an indispensable technique for studying the SVA process, providing information of the BCP thin film structure both laterally and along the film normal. Especially, state-of-the-art combined GISAXS/SVA setups at synchrotron sources have facilitated in situ and real-time studies of the SVA process with a time resolution of a few seconds, giving important insight into the pathways and mechanisms of SVA induced restructuring. We give a short introduction to the GISAXS method and review recent theoretical studies, experimental techniques such as sample preparation and in situ chambers together with SVA protocols, and we review and discuss experimental results. We conclude by giving an outlook on emerging developments of the in situ real-time GISAXS scattering technique in combination with new approaches to control BCP thin film structures using SVA.