Ordered ZnO nanorods synthesized by combustion chemical vapor deposition
Ordered ZnO nanorods synthesized by combustion chemical vapor deposition
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DOI：
10.1166/jnn.2007.874
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发表时间：
2007-12-01
影响因子：
--
通讯作者：
Liu, Meilin
中科院分区：
文献类型：
--
作者：
Liu, Ying;Liu, Meilin
采用燃烧化学气相沉积（CVD）法在硅衬底上制备了直径为50 ~ 300 nm、长度为10 μ m的ZnO单晶棒阵列。ZnO棒的生长方向< 0001 >为{11（2）over bar 0}六个外围表面平面。一个单一的氧化锌棒固态气体传感器上的叉指电极图案制造证明迅速响应乙醇蒸汽在400摄氏度。
Aligned single-crystal ZnO rod arrays with diameters ranging from 50 nm to 300 nm and length up to 10 mu m have been synthesized on silicon substrate under open-air conditions using a combustion chemical vapor deposition (CVD) method. The ZnO rods grew in the direction of < 0001 > with six {11 (2) over bar0} peripheral surface planes. A single ZnO rod solid-state gas sensor fabricated on an interdigitated electrode pattern demonstrated prompt response to ethanol vapor at 400 degrees C.