Effect of electron temperature on negative hydrogen ion production in a low‐pressure Ar discharge plasma with methane
Effect of electron temperature on negative hydrogen ion production in a low‐pressure Ar discharge plasma with methane
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DOI：
10.1063/1.110714
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发表时间：
1993-09
影响因子：
4
通讯作者：
S. Iizuka;T. Koizumi;T. Takada;N. Sato
中科院分区：
文献类型：
--
作者：
S. Iizuka;T. Koizumi;T. Takada;N. Sato
通过使用针空心阴极，在含有甲烷的低压氩气放电等离子体中连续控制负氢离子 (H−) 的产生。通过改变引脚长度来改变电子温度。随着电子温度的降低，观察到负氢离子的产生增加。
Production of negative hydrogen ions (H−) is continuously controlled in a low‐pressure Ar discharge plasma with methane by using a pin‐hollow cathode. The electron temperature is changed by varying the pin length. An enhanced production of negative hydrogen ions is observed with a decrease in the electron temperature.