EO polymer modulators reliability study
EO polymer modulators reliability study
复制标题
EO聚合物调制器可靠性研究
DOI：
10.1117/12.837418
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发表时间：
2010
期刊：
影响因子：
3.8
通讯作者：
R. Dinu
中科院分区：
文献类型：
--
作者：
D. Jin;Hui Chen;A. Barklund;J. Mallari;Guomin Yu;E. Miller;R. Dinu
高速聚合物电光（EO）调制器的可靠性是这些材料在商业应用中使用的最关键的里程碑。我们提供了材料和器件水平的最新热稳定性数据，证明GigOptix聚合物调制器在85 °C下可稳定使用25年。从根本上说，器件材料的可靠性为稳定的最终器件奠定了基础，因此在合成后和晶圆制造期间逐批监测EO材料的特性。在芯片级的关键参数进行了分析，以显示在6”晶圆上的性能分布。采用Jonscher模型拟合的芯片级热研究方法，确定了25年恒温老化EO系数的稳定性和EO材料的活化能。M3 EO材料在85 °C下运行25年后，EO系数变化<10%。
The reliability of high speed polymer electro-optic (EO) modulators is the most critical milestone for the use of these materials in commercial applications. We present recent thermal stability data at material and device level that proves the stability at 85 °C for 25 years of GigOptix' polymer modulators. Fundamentally, the reliability of the device materials lays the foundation for stable final devices, thus the EO materials properties was monitored from batch to batch after synthesis and during wafer fabrication. Key parameters at chip level were analyzed to show the performance distribution on a 6" wafer. Thermal study performed at chip level fitted using Jonscher model was used to determine the isothermal aging stability of EO coefficient for 25 years and the EO materials' activation energy. M3 EO material shows <10 % change in EO coefficient while operating at 85 °C for 25 years.