MEMS: Quo vadis in century XXI?
MEMS: Quo vadis in century XXI?
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DOI：
10.1016/s0167-9317(00)00264-1
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发表时间：
2000-06-01
影响因子：
2.3
通讯作者：
Muller, RS
中科院分区：
文献类型：
--
作者：
Muller, RS
微机电系统（MEMS）的令人兴奋的发展已经带来了通过应用集成电路革命获得的专门知识，以构建微机械和微电子元件的工程微系统的任务。MEMS已经在一些商业领域扎根，并且在其中的增长似乎是明确和健康的：汽车工业，MEMS在生产中用于传感应用，特别是压力和加速度，以及燃料喷射系统;打印机，喷墨技术正在彻底改变一个蓬勃发展的领域（价值30亿美元的全球市场以每年近20%的速度增长）;光学系统，其中新的驱动镜和透镜系统正在用于显示和光纤通信系统;信息存储，其中大大增加密度（预计将增加100倍或更大的存储容量），提高速度和降低成本;以及生物和医疗应用，其中MEMS承诺真正的革命性系统。MEMS进步面临的挑战很多，从需要更多的基础知识到学习更多关于材料，工艺和系统设计以及兼容性，可靠性和接口的知识。要使MEMS设计达到与今天的IC设计一样成熟的状态，必须在建模、仿真和计算机辅助设计方面取得实质性进展。然而，随着集成电路的过去作为序幕，MEMS显然朝着一个神话般的未来招手。
Exciting developments in microelectromechanical systems (MEMS) have been brought about by applying know-how gained through the IC revolution to the task of building both micromechanical and microelectronic elements into engineering microsystems. Some of the commercial areas in which MEMS has taken root, and in which growth seems clear and healthy are: the automotive industry, where MEMS are in production for sensing applications, particularly for pressure and acceleration, and also for fuel-injection systems; printers, where ink-jet technology is revolutionizing a booming field ($3B worldwide market growing at nearly 20% per year); optical systems where new actuated mirror- and lens- systems are being exploited for display and for fiberoptic communication systems; information storage in which much increased density (expected are 100-fold and greater storage-capacity increases) at increased speed and reduced cost; and bio- and medical applications where MEMS promise truly revolutionary systems. The challenges to MEMS progress are many, extending all the way from needs for more knowledge of fundamentals to learning a great deal more about materials, processes, and system design as well as about compatibility, reliability and interfacing. To reach a state when MEMS design is as mature as today's IC design, substantial advances in modeling, simulation and computer-aided design must be made. However, with the IC past as prologue, MEMS clearly beckons towards a fabulous future.