Fabrication and Patterning of Submierometer-Thick Optical Polarizing Films for 800 nm Using Stretched Silver Island Multilayers
Fabrication and Patterning of Submierometer-Thick Optical Polarizing Films for 800 nm Using Stretched Silver Island Multilayers
复制标题
使用拉伸银岛多层膜制造和图案化 800 nm 亚微米厚的光学偏振膜
DOI：
10.1007/s10043-000-0209-4
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发表时间：
2000
期刊：
影响因子：
1.2
通讯作者：
M. Miyagi
中科院分区：
文献类型：
--
作者：
K. Baba;Y. Sato;T. Yoshitake;M. Miyagi
已研究了拉伸的银岛多层膜用于800 nm波长的图案化光学偏振器。通过在660 ° C下拉伸由银岛层和Pyrex层组成的周期性多层膜，制备了亚微米厚度的光学偏振膜。由于光学偏振膜的光学各向异性通过在高于拉伸温度的温度下加热而丧失，因此可以通过高功率密度的激光照射在光学偏振膜上有意地且容易地形成精细的非偏振区域。我们已经成功地形成了各种非偏振区的光学偏振膜上的1W级的二氧化碳激光。所展示的有意图案化光学偏振膜的制造技术将可用于新型光学计算和传感器件。
Stretched silver island multilayers have been investigated for patterned optical polarizers for the wavelength of 800 nm. Submicrometer-thick optical polarizing films are fabricated by stretching periodic multilayers consisting of silver island layers and Pyrex layers at the temperature of 660°C. As the optical anisotropy of the optical polarizing film is lost by heating at a temperature higher than the stretching temperature, the fine non-polarizing areas can be deliberately and easily formed on the optical polarizing film by laser irradiation with high power density. We have successfully formed various non-polarizing areas on the optical polarizing film with a 1 W-class carbon dioxide laser. The demonstrated fabricating techniques of deliberately patterned optical polarizing films should be useful for novel optical computing and sensing devices.