Monolithic Solder-On Nanoporous Si-Cu Contacts for Stretchable Silicone Composite Sensors
Monolithic Solder-On Nanoporous Si-Cu Contacts for Stretchable Silicone Composite Sensors
复制标题
DOI：
10.1021/acsami.9b17076
复制
发表时间：
2019-12-18
影响因子：
9.5
通讯作者：
Guder, Firat
中科院分区：
文献类型：
--
作者：
Kasimatis, Michael;Nunez-Bajo, Estefania;Guder, Firat
我们报告了一种使用纳米多孔 Si-Cu 复合材料创建可焊接、机械坚固的电触点，以将（软）硅基应变传感器与传统（硬）固态电子器件连接起来。硅基焊接电接触由通过金属辅助化学蚀刻和电镀形成的镀铜纳米多孔硅顶面和光滑硅底面组成，可通过等离子键合共价键合到硅基应变传感器上。我们研究了在相关机械应力范围下提出的触点的机械和电气特性，用于生理监测和康复应用。我们还生产了一系列概念验证设备，包括可穿戴呼吸监测器、用于运动监测的腿带以及用于监测手部受伤或神经系统疾病患者康复情况的挤压球，以展示该技术在实际应用中的机械稳健性和多功能性。
We report a method of creating solderable, mechanically robust, electrical contacts to interface (soft) silicone-based strain sensors with conventional (hard) solid-state electronics using a nanoporous Si-Cu composite. The Si-based solder-on electrical contact consists of a copper-plated nanoporous Si top surface formed through metal-assisted chemical etching and electroplating and a smooth Si bottom surface that can be covalently bonded onto silicone-based strain sensors through plasma bonding. We investigated the mechanical and electrical properties of the contacts proposed under relevant ranges of mechanical stress for applications in physiological monitoring and rehabilitation. We also produced a series of proof-of-concept devices, including a wearable respiration monitor, leg band for exercise monitoring, and squeeze ball for monitoring rehabilitation of patients with hand injuries or neurological disorders to demonstrate the mechanical robustness and versatility of the technology developed in real-world applications.