Ultra-precision nano-structure fabrication by amplitude control sculpturing method in elliptical vibration cutting
Ultra-precision nano-structure fabrication by amplitude control sculpturing method in elliptical vibration cutting
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DOI：
10.1016/j.precisioneng.2014.07.009
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发表时间：
2015-01-01
影响因子：
3.6
通讯作者：
Shamoto, Eiji
中科院分区：
文献类型：
--
作者：
Zhang, Jianguo;Suzuki, Norikazu;Shamoto, Eiji
本文研究了利用椭圆振动切削结合超精密振幅控制雕刻方法在淬硬钢表面加工纳米结构。研究了振幅控制雕刻方法的加工性能，探讨了振幅控制雕刻方法在纳米级加工中的局限性。在该方法中，可加工零件的几何形状基本上受到振动条件和刀具几何形状的限制。此外，当加工零件几何形状的斜率变陡时，在振幅命令和刀具轨迹的包络之间产生相当大的误差。为了克服这种误差，提出了一种幅度控制指令的补偿方法。为了阐明所提出的技术的加工性能，进行了一系列的分析和实验研究。此外，通过应用所提出的命令补偿方法，具有大的结构高度与波长的比率的纳米结构被精确地加工。最后将该方法应用于纳米织构沟槽和三维网格曲面的加工，验证了该方法的可行性。(C)2014 Elsevier Inc. All rights reserved.
This paper studies the nano-structure fabrication on hardened steel by means of elliptical vibration cutting equipped with the ultra-precision amplitude control sculpturing method. Machining performance of the amplitude control sculpturing method is investigated, and the limitation in nano-scale machining is explored. In this proposed method, machinable part geometry is essentially restricted by vibration conditions and tool geometry. In addition, a considerable error between the amplitude command and the envelope of the tool trajectory is generated when the slope of the machining part geometry becomes steep. To overcome this error, a compensation method for the amplitude control command is proposed. In order to clarify the machining performance of the proposed technology, a series of analytical and experimental investigations are conducted. Furthermore, by applying the proposed command compensation method, nano-structures with a large ratio of structure height to wave length are machined accurately. The proposed sculpturing method is subsequently applied to the machining of nano-textured grooves and a three-dimensional grid surface, which verifies the feasibility of the proposed amplitude control sculpturing method. (C) 2014 Elsevier Inc. All rights reserved.