A harmless thin film elastic modulus measurement method through bending the nonlinear sliding cantilever beam
A harmless thin film elastic modulus measurement method through bending the nonlinear sliding cantilever beam
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非线性滑动悬臂梁弯曲无害化薄膜弹性模量测量方法
DOI：
10.1016/j.measurement.2021.108984
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发表时间：
2021-01
期刊：
影响因子：
5.6
通讯作者：
Qiongyao Wang
中科院分区：
文献类型：
--
作者：
Jianhua Tang;Lezhang Liu;Li Jiang;Hui Huang;Qiongyao Wang
本文提出了一种新的弹性模量测量方法的设计，通过弯曲的样品，以估计一个小的不规则的薄膜样品的弹性模量没有造成损坏。首先，基于非线性欧拉-伯努利梁理论，利用激光位移传感器和测力计构建了测量系统，获得了挠度与力的关系。弹性模量由应变能和恒力的功来估计。其次，通过单轴拉伸试验验证了该方法的准确性。实验结果表明，用该方法得到的弹性模量与拉伸试验方法得到的弹性模量之间有很好的一致性。两者的相对误差小于2.0%，验证了该方法的准确性。综上所述，提出的测试方法是对无害弹性模量测量方法的补充。
This paper presents the design of a novel elastic modulus measurement method through bending the specimen to estimate the elastic modulus of a small irregular thin-film specimen without causing damage. First of all, based on nonlinear Euler-Bernoulli beam theory, A measurement system is constructed with a laser displacement sensor and a dynamometer to obtain a relationship between deflection and force. The elastic modulus is estimated by the strain energy and the work of a constant force. Secondly, uniaxial tensile tests of specimens are conducted to evaluate the accuracy of the proposed method. The experimental results show good agreement between the elastic modulus obtained using the proposed method and the elastic module obtained through tensile test method. The relative error between them is less than 2.0%, which validates the proposed method’s performance on accuracy. To sum up, the proposed test method is a supplement to the harmless elastic modulus measurement method.
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