Multi-target tracking for automated RF on-wafer probing based on template matching
Multi-target tracking for automated RF on-wafer probing based on template matching
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DOI：
10.1109/marss.2019.8860983
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发表时间：
2019-07
期刊：
影响因子：
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通讯作者：
Hai Li;F. V. von Kleist-Retzow;O. Haenssler;S. Fatikow;Xianmin Zhang
中科院分区：
文献类型：
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作者：
Hai Li;F. V. von Kleist-Retzow;O. Haenssler;S. Fatikow;Xianmin Zhang
提出了一种基于视觉的多目标跟踪方法。首先，引入了一个视觉伺服控制框架，使晶圆上射频探测的对准过程自动化。其次，为了获得视觉伺服控制过程中探头和垫片的精确位姿，提出了一种基于模板匹配的视觉跟踪方法。最后，进行了多目标跟踪和自动对准的实验测试。实验结果表明，所提出的跟踪方法即使在多个目标重叠的情况下也能准确地测量出目标的姿态。此外，探头和垫的自动对准可以成功地实现高精度和高鲁棒性。
This paper presents a vision-based multi-target tracking method for automated on-wafer RF probing. First, a visual servo control framework is introduced to automate the process of alignment for on-wafer RF probing. Second, to obtain accurate poses of the probes and the pads needed during the visual servo control, a visual tracking method based on template matching is proposed. Finally, experimental tests for multi-target tracking and automatic alignment are performed. The results demonstrate that the proposed tracking method can accurately measure poses of the multiple targets even when overlapping occurs. Moreover, automatic alignment of the probe and the pads can be successfully achieved with high accuracy and high robustness.