MICROFABRICATION AND CHARACTERISTICS OF MAGNETIC THIN-FILM INDUCTORS IN THE ULTRAHIGH FREQUENCY REGION
MICROFABRICATION AND CHARACTERISTICS OF MAGNETIC THIN-FILM INDUCTORS IN THE ULTRAHIGH FREQUENCY REGION
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DOI：
10.1063/1.370608
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发表时间：
1999-05
影响因子：
3.2
通讯作者：
M. Yamaguchi;K. Suezawa;K. Arai;Y. Takahashi;S. Kikuchi;Y. Shimada;Weidong Li;S. Tanabe;K. Ito
中科院分区：
文献类型：
--
作者：
M. Yamaguchi;K. Suezawa;K. Arai;Y. Takahashi;S. Kikuchi;Y. Shimada;Weidong Li;S. Tanabe;K. Ito
薄膜电感器的1 GHz驱动移动的通信手机的应用已被证明。这是软磁薄膜在1GHz范围内的可能的实际应用。电感采用Fe 61 Al 13 O26，Ms= 1.2T，ρ=500 μΩ cm，fr= 2GHz。在370 μm×370 μm正方形四匝线/距为11 μm/11 μm的螺旋线上，用0.1 μ m厚的Fe_（61）Al_（13）O_（26）薄膜和Cr作底层，在1GHz时获得了L= 7.6nH，R=6.5 Ω，Q=7.4的特性。L比磁通饱和电感器增加了8.6%，而没有任何品质因数的降低。
Thin-film inductors for 1 GHz-drive mobile communication handset application has been demonstrated. This is the possible practical application of soft magnetic films in 1 GHz range. Fe61Al13O26 with Ms=1.2 T, ρ=500 μΩ cm, fr=2 GHz were used for the inductors. L=7.6 nH, R=6.5 Ω, and Q=7.4 were obtained at 1 GHz in a 370 μm×370 μm square four turn spiral of line/space=11 μm/11 μm covered with 0.1-μm-thick slitted Fe61Al13O26 film with Cr underlayer. The L was increased over the flux saturated inductor by 8.6% without any degrade of quality factor.