Surface modification of optical materials with hydrogen plasma for fabrication of Bragg gratings.
Surface modification of optical materials with hydrogen plasma for fabrication of Bragg gratings.
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DOI：
10.1364/ao.55.000485
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发表时间：
2016-01
期刊：
影响因子：
1.9
通讯作者：
U. Salgaeva;Anatoliy B Volyncev;S. Mendes
中科院分区：
文献类型：
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作者：
U. Salgaeva;Anatoliy B Volyncev;S. Mendes
我们研究氢等离子体工艺作为在光电材料上创建布拉格光栅（BG）的途径，例如未掺杂铌酸锂（LiNbO（3））、质子交换LiNbO（3）和钠钙玻璃。在这些基底上创建光图案（周期性调制，Λ=323-2000 nm），并研究氢等离子体工艺转移微结构的能力以及该工艺中涉及的潜在机制。对 BG 的衍射效率和表面拓扑结构以及经过相同等离子体处理的相应块体材料的光学特性进行了表征。结果表明，氢等离子体处理改变了复折射率，并通过近表面区域的体积膨胀改变了表面拓扑，这两个特征都与材料中结构缺陷的出现有关。氢等离子体提供了独特的灵活性和优势，可用于制造集成光子元件。
We investigate the hydrogen plasma process as a route for creating Bragg gratings (BGs) on optoelectronic materials such as undoped lithium niobate (LiNbO(3)), proton-exchanged LiNbO(3), and soda-lime glass. Photopatterns (periodic modulations, Λ=323-2000 nm) were created on those substrates and the hydrogen plasma process was investigated for its ability to transfer the microstructures and the underlying mechanisms involved in this process. The diffraction efficiency and surface topology of the BG were characterized, as well as the optical properties of corresponding bulk materials undergoing the same plasma treatment. It is shown that the hydrogen plasma treatment changes the complex refractive index and modifies the surface topology with a volume expansion in the near-surface region, and both features are connected to the appearance of structural defects in the materials. The hydrogen plasma offers unique flexibility and advantages that can be explored for the fabrication of integrated photonic components.