Characterization of epitaxial Si1-yCy layers on Si(001) grown by gas-source molecular beam epitaxy
Characterization of epitaxial Si1-yCy layers on Si(001) grown by gas-source molecular beam epitaxy
复制标题
气源分子束外延生长的 Si(001) 上外延 Si1-yCy 层的表征
DOI:
10.1016/s0022-0248(02)02444-2
复制
发表时间:
2003
影响因子:
1.8
通讯作者:
M. Konagai
中科院分区:
文献类型:
--
作者:
K. Abe;A. Yamada;M. Konagai