M.Ohashi and T.Hattori: "Correlation between surface microroughness of silicon oxide film and SiO_2/Si interface structure" Japanese Journal of Applield Physics. 36・4A. L397-L399 (1997)
M.Ohashi and T.Hattori: "Correlation between surface microroughness of silicon oxide film and SiO_2/Si interface structure" Japanese Journal of Applield Physics. 36・4A. L397-L399 (1997)
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M.Ohashi和T.Hattori:“氧化硅膜的表面微观粗糙度与SiO_2/Si界面结构之间的相关性”日本应用物理学杂志36・4A(1997)。
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