Crystallization to Polycrystalline Silicon Thin Film and Simultaneous Inactivation of Electrical Defects by Underwater Laser Annealing
Crystallization to Polycrystalline Silicon Thin Film and Simultaneous Inactivation of Electrical Defects by Underwater Laser Annealing
复制标题
水下激光退火结晶成多晶硅薄膜并同时钝化电缺陷
DOI：
10.1063/1.4772513
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发表时间：
2012
影响因子：
4
通讯作者：
et. al.
中科院分区：
文献类型：
--
作者：
Emi Machida;et. al.
