In situ deposition of neutral Cs for secondary ion mass Spectrometry
In situ deposition of neutral Cs for secondary ion mass Spectrometry
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DOI：
10.1016/j.apsusc.2003.08.020
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发表时间：
2004-01-30
影响因子：
6.7
通讯作者：
Migeon, HN
中科院分区：
文献类型：
--
作者：
Wirtz, T;Migeon, HN
阳离子质谱仪（CMS）是一种新的仪器，可以优化分析MCsx+团簇的有利定量技术。为了进一步提高该仪器的潜力，我们开发了一种柱，该柱提供了一个准直的和可调节的中性Cs原子流，以沉积在样品的表面上，而这一个正在通过二次离子质谱法（西姆斯）进行分析。使用这种新的色谱柱，可以引入一种分析技术，该技术由Xy+离子轰击（其中X代表除Cs之外的任何元素）伴随着Cs-0在样品表面的同时沉积组成。这种实验技术允许成功的溅射和Cs引入过程的去耦，通过避免由高能Cs+离子轰击所施加的约束。因此，可以通过仔细地将Cs浓度调节到其最佳值来同时优化分析的灵敏度，以及通过选择适当的初级轰击条件来优化分析的深度分辨率。在本文中，我们将首先描述新的Cs-0柱，并概述其性能。在第二部分中，我们将专注于分析方面，并研究在一个完整和连续的范围内改变Cs浓度的能力。使用Ga+一次轰击的实验特别表明，在用上述技术进行分析期间产生的Cs浓度仅取决于被分析材料的特性以及侵蚀和沉积速率之间的比率，而不取决于这两个速率的单独值。(C)2003 Elsevier B. V.保留所有权利。
The Cation Mass Spectrometer (CMS) is a new instrument allowing to optimize the advantageous quantification technique consisting in analyzing MCsx+ clusters. To further enhance the potential of this instrument, we have developed a column that delivers a collimated and adjustable stream of neutral Cs atoms to be deposited on the surface of the sample while this one is being analyzed by Secondary Ion Mass Spectrometry (SIMS). Using this new column, it was possible to introduce an analysis technique consisting of a Xy+ ion bombardment (where X stands for any element except Cs) accompanied by a simultaneous deposition of Cs-0 at the surface of the sample. This experimental technique permits a successful decoupling of the sputtering and Cs introduction processes by avoiding the constraints imposed by an energetic Cs+ ion bombardment. As a consequence, it becomes possible to optimize simultaneously the sensitivity of the analysis, by carefully adjusting the Cs concentration to its optimum value, and the depth resolution of the analysis, by choosing adequate primary bombardment conditions. In this paper, we will first describe the new Cs-0 column and outline its performances. In a second part, we will focus on the analytical aspect and study the ability to vary the Cs concentration over a complete and continuous range. Experiments using a Ga+ primary bombardment show in particular that the Cs concentration produced during analyses performed with the mentioned technique only depends on the characteristics of the analyzed material and the ratio between the erosion and deposition rates, but not on the individual values of these two rates. (C) 2003 Elsevier B.V. All rights reserved.