ITO/Au/ITO multilayer thin films on transparent polycarbonate with enhanced EMI shielding properties
ITO/Au/ITO multilayer thin films on transparent polycarbonate with enhanced EMI shielding properties
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DOI：
10.1016/j.cap.2020.01.012
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发表时间：
2020-04-01
影响因子：
2.4
通讯作者：
Ozyuzer, Lutfi
中科院分区：
文献类型：
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作者：
Erdogan, Nursev;Erden, Fuat;Ozyuzer, Lutfi
采用磁控溅射法在聚碳酸酯基底上制备了ITO/Au/ITO多层薄膜。研究了ITO和Au层的沉积时间以优化整体透明度和导电性。采用X射线衍射分析、二次离子质谱、扫描和透射电子显微镜、原子力显微镜和物理性能测试系统对薄膜进行了表征。光学测量结果表明，增加金沉积时间至15 s，薄膜的透射率得到了提高。超过该点，进一步增加持续时间导致光学透射率降低。在优化Au沉积时间后，还研究了ITO层的沉积持续时间以增加电磁干扰（EMI）屏蔽效能（SE）。在这项工作中的最大EMI SE测量为26.8 dB，产生99.8%的功率衰减，这是由仿真结果验证。
ITO/Au/ITO multilayer thin films were deposited onto polycarbonate substrate via magnetron sputtering technique without intentional heating. The deposition times of both ITO and Au layers were studied to optimize the overall transparency and conductivity. As-prepared thin films were characterized using X-ray diffraction analysis, secondary ion mass spectroscopy, scanning and transmission electron microscopy, atomic force microscopy and physical property measurement system. The optical measurement results revealed that the transmittance of the films were enhanced by increasing the gold deposition time up to 15 s. Beyond this point, further increasing the duration caused a decrease in optical transmittance. Upon optimization of the Au deposition time, the deposition duration of ITO layers was also studied to increase electromagnetic interference (EMI) shielding effectiveness (SE). Maximum EMI SE in this work was measured as 26.8 dB, yielding 99.8% power attenuation, which was verified by simulation results.