Exact Period Thickness Control of Soft X-ray Multilayers on Curved Substrates
Exact Period Thickness Control of Soft X-ray Multilayers on Curved Substrates
复制标题
弯曲基底上软X射线多层膜的精确周期厚度控制
DOI:
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发表时间:
2008
期刊:
影响因子:
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通讯作者:
M. Yamamoto
中科院分区:
文献类型:
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作者:
T. Harada;T. Jinno;M. Toyoda;T. Hatano;M. Yamamoto