Twin-mass accelerometer optimization to reduce the package stresses
Twin-mass accelerometer optimization to reduce the package stresses
复制标题
DOI：
10.1016/s0924-4247(99)00312-x
复制
发表时间：
2000-03-15
影响因子：
4.6
通讯作者：
Cané, C
中科院分区：
文献类型：
--
作者：
Plaza, JA;Esteve, J;Cané, C
The geometry optimization of a piezoresistive Twin-mass accelerometer is presented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. Finite element simulations are carried out to improve the geometry of the Twin-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a factor of more than 40. Moreover, the sensitivity and the figure of merit of the device can be easily increased. (C) 2000 Elsevier Science S.A. All rights reserved.
