Lithium-Niobate Mach-Zehnder Interferometer With Enhanced Index Contrast by SiO2 Film
Lithium-Niobate Mach-Zehnder Interferometer With Enhanced Index Contrast by SiO2 Film
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DOI：
10.1109/lpt.2015.2415038
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发表时间：
2015-06
影响因子：
2.6
通讯作者：
Kaixin Chen;Xue Peng Li;Y. Zheng;K. Chiang
中科院分区：
文献类型：
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作者：
Kaixin Chen;Xue Peng Li;Y. Zheng;K. Chiang
采用退火质子交换工艺设计并制作了一种电光可调谐的铌酸锂波导马赫-曾德尔干涉仪。MZI由直波导臂和弯曲波导臂组成，弯曲波导臂的两侧沉积有SiO2薄膜。SiO2薄膜产生的残余应力可以提高弯曲波导臂的折射率对比度，从而降低MZI的弯曲损耗。几个实验设备上制造的相同的芯片尺寸为50毫米× 7毫米的比较证实了插入损耗的显着降低，通过将二氧化硅膜。对于我们最好的样品，它作为一个可调梳状滤波器的通道间距为0.75 nm的C波段，两个输出端口的插入损耗分别为13.5和6 dB，相应的最大消光比为~23和~1.5 dB。该器件的电波长调谐灵敏度为-0.2 nm/V，温度灵敏度为~0.1 nm/°C。我们的设计方法可以显着提高LN设备，需要波导弯曲的质量。
An electro-optic tunable lithium-niobate (LN) waveguide Mach-Zehnder interferometer (MZI) is designed and fabricated with the annealed proton-exchange process. The MZI consists of a straight waveguide arm and a bent waveguide arm with a SiO2 film deposited on the two sides. The residual stress generated by the SiO2 film can enhance the index contrast of the bent waveguide arm and thus reduce the bending loss of the MZI. A comparison of several experimental devices fabricated on the same chip size of 50 mm x 7 mm confirms significant reduction of the insertion loss by incorporating the SiO2 film. For our best sample, which functions as a tunable comb filter with a channel spacing of 0.75 nm in the C-band, the insertion losses of the two output ports are 13.5 and 6 dB, respectively, and the corresponding maximum extinction ratios are ~23 and ~1.5 dB. The device has an electrical wavelength-tuning sensitivity of -.0.2 nm/V and a temperature sensitivity of ~0.1 nm/°C. Our design approach can significantly improve the quality of LN devices that require waveguide bends.