Thin film microcrystalline silicon layers and solar cells
Thin film microcrystalline silicon layers and solar cells
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发表时间:
2003
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通讯作者:
C. Droz
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作者:
C. Droz
............................................................................................ 1 Résumé ............................................................................................. 3 Chapter 1: Introduction .......................................................................... 5 1.1. Motivation ......................................................................................................... 5 1.1.1. The need for photovoltaics (PV)............................................................. 5 1.1.2. The role of silicon thin films in PV......................................................... 6 1.2. Hydrogenated microcrystalline silicon (mc-Si:H)........................................... 8 1.2.1. Microstructure of mc-Si:H....................................................................... 8 1.2.1.1. Techniques for the characterisation of the microstructure ................10 1.2.2. Deposition technique for thin film silicon layers and solar cells: VHF PE-CVD ................................................................................................ 10 1.2.3. Hydrogenated amorphous silicon (a-Si:H)............................................ 12 1.2.4. Stability of mc-Si:H ............................................................................... 13 1.3. Outline of this thesis ....................................................................................... 14 Chapter 2: Micro-Raman spectroscopy ....................................................17 2.