Digital holography for quantitative phase-contrast imaging

Digital holography for quantitative phase-contrast imaging
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DOI:
10.1364/ol.24.000291
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发表时间:
1999-03-01
期刊:
影响因子:
3.6
通讯作者:
Depeursinge, C
Depeursinge, C
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Cuche, E;Bevilacqua, F;Depeursinge, C

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我们提出了数字全息术在相衬成像和光学计量方面的新应用。这种全息成像技术使用一台CCD摄像机记录数字菲涅耳离轴全息图,并用数值方法再现全息图。该方法同时提供幅度对比度图像和定量相位对比度图像。给出了一个表面轮廓术的应用实例,并与接触式测头测量结果进行了比较,结果吻合较好。(C)1999年美国光学学会。
We present a new application of digital holography for phase-contrast imaging and optical metrology. This holographic imaging technique uses a CCD camera for recording of a digital Fresnel off-axis hologram and a numerical method for hologram reconstruction. The method simultaneously provides an amplitude-contrast image and a quantitative phase-contrast image. An application to surface profilometry is presented and shows excellent agreement with contact-stylus probe measurements. (C) 1999 Optical Society of America.