High-density CMOS Microelectrode Array System for Impedance Spectroscopy and Imaging of Biological Cells.
High-density CMOS Microelectrode Array System for Impedance Spectroscopy and Imaging of Biological Cells.
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DOI：
10.1109/icsens.2016.7808761
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发表时间：
2017-01-26
期刊：
影响因子：
--
通讯作者：
Andreas H
中科院分区：
文献类型：
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作者：
Vijay V;Raziyeh B;Amir S;Jelena D;Alicia BJ;Axel B;Jan M;Yihui C;Andreas H
采用单片测量平台，可对多功能 CMOS 微电极阵列上的细胞进行无标记体外电阻抗光谱测量。该阵列包括 59,760 个铂微电极，以 13.5 μm 的间距密集排列在 4.5 mm × 2.5 mm 的传感区域内。 32 个片上锁定放大器可用于测量阵列上任意选择的电极的阻抗，方法是施加由片上波形发生器生成的频率范围为 1 Hz 至 1 MHz 的正弦电压，并测量相应的电流。本文展示了阻抗传感和成像的概念验证测量。建立了通过光学显微镜和电化学阻抗扫描进行细胞检测之间的相关性。
A monolithic measurement platform was implemented to enable label-free in-vitro electrical impedance spectroscopy measurements of cells on multi-functional CMOS microelectrode array. The array includes 59,760 platinum microelectrodes, densely packed within a 4.5 mm × 2.5 mm sensing region at a pitch of 13.5 μm. The 32 on-chip lock-in amplifiers can be used to measure the impedance of any arbitrarily chosen electrodes on the array by applying a sinusoidal voltage, generated by an on-chip waveform generator with a frequency range from 1 Hz to 1 MHz, and measuring the respective current. Proof-of-concept measurements of impedance sensing and imaging are shown in this paper. Correlations between cell detection through optical microscopy and electrochemical impedance scanning were established.