Precise temperature control of microfluidic chamber for gas and liquid phase reactions
Precise temperature control of microfluidic chamber for gas and liquid phase reactions
复制标题
DOI：
10.1016/s0924-4247(99)00356-8
复制
发表时间：
2000-08-01
影响因子：
4.6
通讯作者：
Ip, NY
中科院分区：
文献类型：
--
作者：
Lao, AIK;Lee, TMH;Ip, NY
研制了一种集成铂加热器和传感器的硅基微机械流体腔，并对其进行了热特性分析。该装置高度适用于需要良好热控制的气相和液相反应。腔室通过薄氮化硅膜与体硅热隔离，从而导致低功耗。数字反馈控制装置具有精确的温度控制、良好的温度均匀性、快速加热和冷却的能力。这些热特性是由于小型化反应室和微型全分析系统（mu TAS）的成功。此外，增益调度控制算法结合正常的反馈比例积分（PI）计划，以提供更好的热循环性能。还进行了3D数值模拟以绘制小型化流体装置内的空间温度分布。仿真结果与实验数据吻合较好。(C)2000 Elsevier Science S.A. All rights reserved.
A silicon-based micromachined fluidic chamber with integrated platinum heaters and sensors has been developed and thermally well characterized. This device is highly applicable to both gas and liquid phase reactions that require excellent thermal control. The chamber is thermally isolated from the bulk silicon by a thin silicon nitride membrane resulting in low power consumption. The digitally feedback controlled device demonstrates the ability of precise temperature control, excellent temperature uniformity, rapid heating and cooling. These thermal characteristics are ascribable to the success of miniaturized reaction chamber and Micro Total Analysis Systems (mu TAS). In addition, gain scheduling control algorithm in conjunction with normal feedback proportional and integral (PI) scheme was implemented to provide better thermal cycling performance. 3D numerical simulation was also conducted to map the spatial temperature distribution within the miniaturized fluidic device. Simulation results and experimental data show good agreements. (C) 2000 Elsevier Science S.A. All rights reserved.