Design and Development of Millimeter-Wave Micromachined Patch Antennas

Design and Development of Millimeter-Wave Micromachined Patch Antennas
复制标题

毫米波微机械贴片天线的设计与开发

DOI：
--
复制
发表时间：
2009
期刊：
影响因子：
--
通讯作者：
S. Koul
S. Koul
中科院分区：
--
文献类型：
--
作者：
Preeti Sharma;S. Koul

文献摘要

被引文献

相似文献

摘要在本文中，我们报告的高性能Ka波段微机械贴片天线的设计，开发和制造使用单片微波集成电路（MMIC）兼容的工艺技术。本文的主要重点是使用射频（RF）溅射作为潜在的金属-介电膜沉积工艺的快速原型的许多天线结构的情况下访问一个完善的MEMS铸造。所制备的天线具有4%-5%的阻抗带宽，这比在体高折射率衬底上制备的天线宽得多。
Abstract In this paper, we report design, development and fabrication of high-performance Ka-band micromachined patch antennas using monolithic microwave integrated circuit (MMIC)-compatible process technology. The main emphasis of this paper is to use radio frequency (RF) sputtering as the potential metal-dielectric film deposition process for rapid prototyping of many antenna structures in the absence of access to a well-established MEMS foundry. The fabricated antennas exhibited 4%–5% of impedance bandwidth, which is much wider than the one fabricated on bulk high-index substrates.