Compact snapshot multiwavelength interferometer
Compact snapshot multiwavelength interferometer
复制标题
紧凑型快照多波长干涉仪
DOI：
10.1364/ol.44.004463
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发表时间：
2019-09-15
期刊：
影响因子：
3.6
通讯作者：
Liang, Rongguang
中科院分区：
文献类型：
--
作者：
Wang, Daodang;Tian, Xiaobo;Liang, Rongguang
我们提出了一种快照和紧凑的多波长干涉仪，用于实时测试具有大斜率的光学表面。利用带微偏振器阵列的彩色相机同时捕获多个波长的相移干涉图，从中提取每个波长上相移值为pi/2的4幅干涉图，用于多波长相移干涉测量。实验验证了该系统的准确性，并对大坡度自由曲面进行了验证。该系统为实现自由曲面的实时在线测量提供了一种可行的方法，同时又能最大限度地减少环境干扰。(C) 2019美国光学学会
We propose a snapshot and compact multiwavelength interferometer for real-time testing of optical surfaces with large slopes. A color camera with a micropolarizer array simultaneously captures the phase-shifted interferograms of multiple wavelengths, from which four interferograms with pi/2 phase shift at each wavelength are extracted for multiwavelength phase-shifting interferometric measurement. The accuracy of the proposed system is validated experimentally, and the testing of freeform surface with large slopes is also demonstrated. The proposed system provides a feasible way to obtain the instantaneous online measurement of freeform surfaces while minimizing environmental disturbance. (C) 2019 Optical Society of America