Effect of excess Pb on ferroelectric characteristics of conductive Al-doped ZnO and Sn-doped In2O3 top electrodes in PbLaZrTiOx capacitors
Effect of excess Pb on ferroelectric characteristics of conductive Al-doped ZnO and Sn-doped In2O3 top electrodes in PbLaZrTiOx capacitors
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DOI：
10.3139/146.111154
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发表时间：
2015-01
影响因子：
0.8
通讯作者：
Yoko Takada;T. Tsuji;N. Okamoto;Takeyasu Saito;K. Kondo;T. Yoshimura;N. Fujimura;K. Higuchi;A. Kitajima;A. Oshima
中科院分区：
文献类型：
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作者：
Yoko Takada;T. Tsuji;N. Okamoto;Takeyasu Saito;K. Kondo;T. Yoshimura;N. Fujimura;K. Higuchi;A. Kitajima;A. Oshima
摘要研究了化学溶液沉积掺杂镧锆钛酸铅（PLZT） （Pb:La:Zr:Ti = Pb:3:30:70, Pb = 105 ~ 117）对脉冲激光沉积的导电掺杂铝氧化锌（AZO）和掺杂锡氧化铟（ITO）作为顶电极的Pb含量的影响。对ITO/PLZT/Pt和AZO/PLZT/Pt电容器的结晶度、表面形貌、铁电性能和抗氢降解性能进行了评价。所有PLZT薄膜均表现为钙钛矿相（x射线衍射图），表面形貌和晶粒尺寸相似（扫描电镜图）。Pb含量为113的PLZT电容器在15 V （300 kV cm−1）时的残余极化最大，但4种Pb含量水平间的抗氢降解能力差异不大。
Abstract The Pb content effect of chemical solution deposited lanthanum-doped lead zirconate titanate (PLZT) (Pb:La:Zr:Ti = Pb:3:30:70, Pb = 105∼117) was studied for conductive aluminum-doped zinc oxide (AZO) and tin-doped indium oxide (ITO) deposited as top electrodes by means of pulsed laser deposition. The crystallinity, surface morphology, ferroelectric properties and hydrogen degradation resistance of the ITO/PLZT/Pt and AZO/PLZT/Pt capacitors were evaluated. All the PLZT films showed perovskite phase (revealed by X-ray diffraction patterns) and showed similar surface morphology and grain size (revealed by scanning electron microscopy images). PLZT capacitors with a Pb content of 113 exhibited the largest remnant polarization (at 15 V (300 kV cm−1)), however, the difference in hydrogen degradation resistance was small between the four levels of Pb content.