Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
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DOI：
10.1016/s0924-4247(99)00337-4
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发表时间：
2000-05-15
影响因子：
4.6
通讯作者：
Carraro, C
中科院分区：
文献类型：
--
作者：
Maboudian, R;Ashurst, WR;Carraro, C
尽管表面微加工技术取得了重大进展，但粘滞仍然是一个关键问题，严重限制了许多微机电系统 (MEMS) 设备的实现和可靠性。在本文中，我们重点关注作为 MEMS 释放和抗粘连涂层的自组装单分子层。描述了它们的形成机制、微结构涂层过程和涂层微结构的特征，然后讨论了该涂层技术当前的局限性、需要改进的领域和最新进展。 (C) 2000 Elsevier Science S.A. 保留所有权利。
Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization and reliability of many micro-electro-mechanical systems (MEMS) devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics of the coated microstructures are described, followed by a discussion of the current limitations, areas for improvements and recent progress for this coating technology. (C) 2000 Elsevier Science S.A. All rights reserved.