Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes
Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes
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DOI：
10.1109/jmems.2012.2189356
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发表时间：
2012-06-01
影响因子：
2.7
通讯作者：
Akin, Tayfun
中科院分区：
文献类型：
--
作者：
Tatar, Erdinc;Alper, Said Emre;Akin, Tayfun
本文介绍了实验数据的正交误差的来源，在一个完全解耦的微机电系统陀螺仪，并证明了性能改善的程度，通过消除这种错误。正交源，包括质量，静电力，和机械弹簧的不平衡进行了比较，通过有限元模拟，和弹簧不平衡已被发现的正交误差的主要来源。陀螺仪已被设计与故意的弹簧不平衡和SOI为基础的硅玻璃制造工艺制造，所产生的正交输出的制造陀螺仪已被测量，并与有限元模拟的协议已被验证。接下来，实验表明，利用闭环控制电子器件对正交误差的静电归零将完全解耦的陀螺仪的偏置不稳定性和角度随机游走（ARW）提高了多达十倍。此外，正交抵消提高了比例因子的开启重复性约4倍和线性度约20倍，分别达到119和86 ppm。最后，正交抵消允许以更高的驱动模式位移幅度操作陀螺仪，以提高速率灵敏度。利用这种技术，已经实现了分别为0.39度/h和0.014度/根h的出色的偏置不稳定性和ARW性能。[2011-0078]
This paper presents experimental data about the sources of the quadrature error in a fully decoupled microelectromechanical systems gyroscope and demonstrates the extent of performance improvement by the cancellation of this error. Quadrature sources including mass, electrostatic-force, and mechanical-spring imbalances have been compared by FEM simulations, and spring imbalance has been found as the dominant source of the quadrature error. Gyroscopes have been designed with intentional spring imbalances and fabricated with a SOI-based silicon-on-glass fabrication process, the resulting quadrature outputs of the fabricated gyroscopes have been measured, and their agreement with FEM simulations has been verified. Next, it has been experimentally shown that the electrostatic nulling of the quadrature error with closed-loop control electronics improves the bias instability and angle random walk (ARW) of a fully decoupled gyroscope up to ten times. Moreover, the quadrature cancellation improves the scale-factor turn-on repeatability about four times and linearity about 20 times, reaching down to 119 and 86 ppm, respectively. Finally, the quadrature cancellation allows operating the gyroscope with higher drive-mode displacement amplitudes for an increased rate sensitivity. With this technique, outstanding bias instability and ARW performances of 0.39 degrees/h and 0.014 degrees/root h, respectively, have been achieved. [2011-0078]