Patterning of granular magnetic media with a focused ion beam to produce single-domain islands at >140 Gbit/in/sup 2/
Patterning of granular magnetic media with a focused ion beam to produce single-domain islands at >140 Gbit/in/sup 2/
复制标题
使用聚焦离子束对颗粒磁介质进行图案化，以产生 >140 Gbit/in/sup 2/ 的单畴岛
DOI：
10.1109/20.950927
复制
发表时间：
2001
影响因子：
2.1
通讯作者：
B. Terris
中科院分区：
文献类型：
--
作者：
C. Rettner;M. Best;B. Terris
我们已经使用聚焦离子束直接图案化薄膜颗粒垂直Co/sub 70/Cr/sub 18/Pt/sub 12/介质。通过在/spl sim/20 nm介质中切割6 nm深的沟槽/spl sim/，我们已经产生了周期在65-500 nm范围内的磁隔离岛的方形阵列。在低于/spl sim/130 nm的周期，我们只观察到单一的磁畴，表现出粗糙的“棋盘”图案后，交流退磁。我们的图案密度超过140 Gbit/in/sup 2/。
We have used a focused ion beam to directly pattern thin-film granular perpendicular Co/sub 70/Cr/sub 18/Pt/sub 12/ media. By cutting trenches /spl sim/6 nm deep in the /spl sim/20 nm media, we have produced square arrays of magnetically isolated islands with periods in the range 65-500 nm. At periods below /spl sim/130 nm we observe only single magnetic domains, which exhibit a rough "checker-board" pattern upon ac demagnetization. We have patterned at densities of over 140 Gbit/in/sup 2/.