Niobium and niobium-titanium nitrides for RF applications

Niobium and niobium-titanium nitrides for RF applications
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用于射频应用的铌和铌钛氮化物

DOI:
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发表时间:
1993
影响因子:
1.8
通讯作者:
V. Buscaglia
V. Buscaglia
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
P. Fabbricatore;G. Gemme;R. Musenich;R. Parodi;M. Viviani;B. Zhang;V. Buscaglia

文献摘要

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研究了铌和铌钛氮化物在射频器件中的应用。利用氮在大块铌和合金中扩散法制备的氮化物样品,通过x射线衍射、扫描电镜和交流磁测量对其进行了表征。观察到氮化铌的几种相:在样品表面,氮含量较高的相的临界温度约为15 K,但较低的T/sub / c/和非超导相的夹杂物均增强了射频表面电阻。氮化铌钛表面由临界温度高达17k的相组成,未观察到不需要的相<<ETX>>
The application of niobium and niobium-titanium nitrides in RF devices is studied. Nitride samples, prepared by diffusion of nitrogen in bulk niobium and alloy, have been characterized by X-ray diffraction, SEM and AC magnetic measurements. Several phases of niobium nitride have been observed: the phase with higher nitrogen content, at the sample surface, has critical temperature about 15 K but inclusions of both lower T/sub c/ and nonsuperconducting phases enhance the RF surface resistance. The niobium-titanium nitride surface is composed by a phase having critical temperature up to 17 K and unwanted phases were not observed.<<ETX>>