Structure Zone Investigation of Multiple Principle Element Alloy Thin Films as Optimization for Nanoindentation Measurements
Structure Zone Investigation of Multiple Principle Element Alloy Thin Films as Optimization for Nanoindentation Measurements
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DOI：
10.3390/ma13092113
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发表时间：
2020-05
期刊：
影响因子：
3.4
通讯作者：
A. Savan;Timo Allermann;Xiao Wang;Dario Grochla;Lars Banko;Y. Kalchev;A. Kostka;J. Pfetzing‐Micklich;A. Ludwig
中科院分区：
文献类型：
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作者：
A. Savan;Timo Allermann;Xiao Wang;Dario Grochla;Lars Banko;Y. Kalchev;A. Kostka;J. Pfetzing‐Micklich;A. Ludwig
多主元素合金，通常也被称为成分复杂的合金或高熵合金，对表征提出了极大的挑战。他们显示了一个巨大的，多维的组成空间，值得详细的调查和优化，以确定组成和映射的组成范围，其中有用的性能保持。组合薄膜材料库是一种具有成本效益和效率的方式，可以直接创建可比较的、受控的成分变化。对它们进行表征也有其自身的挑战，包括需要对数十到数百种或更多的成分进行高速自动测量。通过对临界沉积参数的可预测控制来选择适当的薄膜形态，可以获得具有较小散射的代表性测量值，即，对于每种特定的组合物需要较少的测量重复。在本研究中，等原子的CoCrFeNi的磁控溅射生长在不同的位置上的结构区图适用于多元合金，其次是显微组织和形态特征。通过增加温度和增加高功率脉冲磁控溅射（HiPIMS）等离子体发生器来增加沉积过程的能量输入，导致更致密、更均匀的形貌和更光滑的表面，直到再结晶和晶界开槽开始。即使没有HiPIMS发生器的额外粒子能量输入，在300 °C下的生长也导致一致可重复的纳米压痕载荷-位移曲线以及所得的硬度和杨氏模量值。
Multiple principal element alloys, also often referred to as compositionally complex alloys or high entropy alloys, present extreme challenges to characterize. They show a vast, multidimensional composition space that merits detailed investigation and optimization to identify compositions and to map the composition ranges where useful properties are maintained. Combinatorial thin film material libraries are a cost-effective and efficient way to create directly comparable, controlled composition variations. Characterizing them comes with its own challenges, including the need for high-speed, automated measurements of dozens to hundreds or more compositions to be screened. By selecting an appropriate thin film morphology through predictable control of critical deposition parameters, representative measured values can be obtained with less scatter, i.e., requiring fewer measurement repetitions for each particular composition. In the present study, equiatomic CoCrFeNi was grown by magnetron sputtering in different locations in the structure zone diagram applied to multinary element alloys, followed by microstructural and morphological characterizations. Increasing the energy input to the deposition process by increased temperature and adding high-power impulse magnetron sputtering (HiPIMS) plasma generators led to denser, more homogeneous morphologies with smoother surfaces until recrystallization and grain boundary grooving began. Growth at 300 °C, even without the extra particle energy input of HiPIMS generators, led to consistently repeatable nanoindentation load–displacement curves and the resulting hardness and Young’s modulus values.