Fluidized bed chemical vapor deposition of pyrolytic carbon-III. Relationship between microstructure and mechanical properties

Fluidized bed chemical vapor deposition of pyrolytic carbon-III. Relationship between microstructure and mechanical properties
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DOI:
10.1016/j.carbon.2015.05.009
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发表时间:
2015-09
期刊:
影响因子:
10.9
通讯作者:
Huixing Zhang;E. López-Honorato;P. Xiao
Huixing Zhang;E. López-Honorato;P. Xiao
中科院分区:
材料科学2区
文献类型:
--
作者:
Huixing Zhang;E. López-Honorato;P. Xiao

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采用流化床化学气相沉积法在不同沉积条件下制备了不同密度的热解碳涂层。采用纳米压痕法测量了其弹性模量和硬度,通过分析压痕力-位移曲线研究了其变形行为。压痕下PyC的变形机制归因于石墨烯平面的滑移,并从微观结构缺陷的角度讨论了其可逆性。我们观察到PyC的密度和它们的杨氏模量和硬度之间的线性关系,密度低于1.9 g/cm 3。高于该值,机械性能由间隙缺陷的量控制。样品还在1800 °C和2000 °C下进行热处理,并讨论了它们的微观结构、硬度和杨氏模量的变化作为密度的函数。
Pyrolytic carbon (PyC) coatings with different densities were produced by fluidized bed chemical vapor deposition under different deposition conditions. Their Young’s modulus and hardness were measured by nano-indentation, whereas the deformation behavior was studied through analyzing the force–displacement curves of the indentations. The deformation mechanism of PyC under indentation is attributed to the slip of the graphene planes, and its reversibility is discussed in terms of the defects of the microstructure. We observed a linear relationship between the density of PyC’s and their Young’s modulus and hardness, for densities lower than 1.9 g/cm3. Above this value, the mechanical properties were controlled by the amount of interstitial defects. Samples were also heat treated at 1800 °C and 2000 °C, and their changes in microstructure, hardness and Young’s modulus are discussed as a function of density.