An assistance system for the selection of sensors in multi-scale measurement systems
An assistance system for the selection of sensors in multi-scale measurement systems
复制标题
多尺度测量系统中传感器选择的辅助系统
DOI：
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复制
发表时间：
2010
期刊：
影响因子：
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通讯作者：
W. Osten
中科院分区：
文献类型：
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作者：
A. Burla;T. Haist;W. Lyda;W. Osten
使用多传感器多尺度系统进行光学检测需要选择合适的传感器及其参数（例如分辨率、na、照明条件）和测量策略。我们提出了一个辅助系统，自动选择合适的传感器及其参数的检测规范。根据试样和缺陷的特性（如几何形状、材料等）对辅助系统进行描述。然后，该系统使用不同的“子助手”，每个都为特定的测量技术设计，以推荐最合适的测量设置。介绍了条纹投影技术的系统和初步结果。
Optical inspection using multi-sensor multi-scale systems requires the selection of proper sensors, their parameters (e.g. resolution, N.A, lighting conditions), and measurement strategies. We propose an assistance system that automatically selects the suitable sensors and their parameters for an inspection specification. The specimen and the defects are described based on their properties (e.g. geometry, material etc) to the assistance system. The system then uses different "sub-assistants", each designed for a specific measurement technique, to recommend the most suitable measurement setups. The system and initial results for fringe projection techniques are presented.