Fusion: Ultra-high-speed and IR image sensors
Fusion: Ultra-high-speed and IR image sensors
复制标题
Fusion：超高速和红外图像传感器
DOI：
10.1117/12.2190512
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发表时间：
2015
期刊：
影响因子：
--
通讯作者：
M. Kimata
中科院分区：
文献类型：
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作者：
T. G. Etoh;V. T. S. Dao;Q. A. Nguyen;M. Kimata
超高速摄像机工作在1 Mfps以上的大多数目标，如燃烧、裂纹扩展、碰撞、等离子体、火花放电、车祸时的安全气囊和突然刹车时的轮胎，都会产生突然的热量。这些领域的研究人员需要工具来同时测量高速运动和热量。超高帧速率成像是通过现场存储图像传感器实现的。传感器的每个像素配备有多个存储元件，以在所有像素处同时记录一系列图像信号。在图像捕获操作之后读出存储在每个像素中的图像信号。2002年，我们开发了一种工作在1Mfps的就地存储图像传感器。然而，传感器的填充系数只有15%，这是因为光罩覆盖了现场广泛的存储区域。因此，在2011年，我们开发了背面照明(BSI)原位存储图像传感器，以100%的填充系数和非常高的量子效率来提高灵敏度。该传感器还实现了更高的帧速率，达到16.7Mfps，这要归功于正面的布线，更自由。BSI结构还有另一个优点，那就是在背面附加一层例如闪烁体的困难较小。本文将先进的纳米红外成像技术与超高速成像的原位存储技术相结合，提出了一种超高速红外图像传感器的研制方案，并对其中的问题进行了讨论。
Most targets of ultra-high-speed video cameras operating at more than 1 Mfps, such as combustion, crack propagation, collision, plasma, spark discharge, an air bag at a car accident and a tire under a sudden brake, generate sudden heat. Researchers in these fields require tools to measure the high-speed motion and heat simultaneously. Ultra-high frame rate imaging is achieved by an in-situ storage image sensor. Each pixel of the sensor is equipped with multiple memory elements to record a series of image signals simultaneously at all pixels. Image signals stored in each pixel are read out after an image capturing operation. In 2002, we developed an in-situ storage image sensor operating at 1 Mfps1). However, the fill factor of the sensor was only 15% due to a light shield covering the wide in-situ storage area. Therefore, in 2011, we developed a backside illuminated (BSI) in-situ storage image sensor to increase the sensitivity with 100% fill factor and a very high quantum efficiency2). The sensor also achieved a much higher frame rate,16.7 Mfps, thanks to the wiring on the front side with more freedom3). The BSI structure has another advantage that it has less difficulties in attaching an additional layer on the backside, such as scintillators. This paper proposes development of an ultra-high-speed IR image sensor in combination of advanced nano-technologies for IR imaging and the in-situ storage technology for ultra-highspeed imaging with discussion on issues in the integration.