Laser Micromachining Technique of Nano-Particles Dispersed Polymer
Laser Micromachining Technique of Nano-Particles Dispersed Polymer
复制标题
纳米粒子分散聚合物激光微加工技术
DOI：
10.1541/ieejsmas.123.429
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
O. Tabata
中科院分区：
文献类型：
--
作者：
H. Yagyu;S. Hayashi;O. Tabata
提出了一种新的激光微加工技术，利用新开发的抗蚀剂实现具有自由形状壁的高深宽比微结构。抗蚀剂由分散有平均直径为3.4nm的纳米粒子的乙基纤维素构成。由于该抗蚀剂在约530 nm的波长处具有强吸收，因此可以使用聚焦低功率输出Nd:YVO 4 -SHG激光（CW，波长532 nm，功率输出23 mW）对其进行加工。实验证实，横截面形状可以通过Au浓度（1-50wt%）和激光束功率来控制。加工深度显示出对 Au 浓度的强烈依赖性，并且在 17 wt% Au 浓度时显示最大值。从光刻胶温升的理论计算和加工光刻胶表面的分析可以看出，加工通道底部的Au聚集对加工深度起着重要作用。
A new laser micromachining technique to realize high aspect ratio microstructure with free shaped wall using newly developed resist was proposed. The resist is made of ethylcellulose in which nano-particles with average diameter of 3.4 nm was dispersed. Since this resist has a strong absorption at wavelength of about 530 nm, it can be processed using focused low power output Nd:YVO 4 -SHG laser (CW, wavelength of 532 nm, power output of 23 mW). From the experiments, it was confirmed that the cross-sectional shape can be controlled by the Au concentration (1-50 wt%) and the laser beam power. The processed depth showed a strong dependency on Au concentration and showed maximum at 17 wt% Au concentration. From the theoretical calculation of the resist temperature rise and analysis of the processed resist surface, it was revealed that the Au aggregation at the bottom of the processed channel played an important role for the processed depth.