Study on Surface Acoustic Wave Characteristics of SiO2/Interdigital-Transducer/ZnO/Diamond Structure and Fabrication of 2.5 GHz Narrow Band Filter
Study on Surface Acoustic Wave Characteristics of SiO2/Interdigital-Transducer/ZnO/Diamond Structure and Fabrication of 2.5 GHz Narrow Band Filter
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SiO2/叉指换能器/ZnO/金刚石结构的表面声波特性研究及2.5 GHz窄带滤波器的制作
DOI：
10.1143/jjap.37.2918
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发表时间：
1998
影响因子：
1.5
通讯作者：
S. Shikata
中科院分区：
文献类型：
--
作者：
H. Nakahata;H. Kitabayashi;T. Uemura;A. Hachigo;K. Higaki;S. Fujii;Y. Seki;Kentaroh Yoshida;S. Shikata
对SiO2/叉指换能器（IDT）/ZnO/金刚石结构的声表面波（SAW）特性进行了理论和实验研究。结果表明，该结构中的第二模式可以提供零温度系数的频率（TCF）以及10,000 m/s的高速度和1.4%的大机电耦合系数。利用该波，成功地制作了2.5 GHz窄带SAW滤波器，叉指宽度为0.9 μm，在-40 ~85 °C温度范围内，该滤波器的插入损耗为6.7 dB，Q值为660，频偏为100 ppm，具有上级特性。插入损耗小于任何其他重定时滤波器，这曾经被报道与石英，一种传统的SAW材料，也与温度的频率偏差小于ST切石英的情况下。
Surface acoustic wave (SAW) characteristics of the SiO2/interdigital-transducer(IDT)/ZnO/diamond structure were studied theoretically and experimentally. It was found that the 2nd mode in this structure can provide a zero temperature coefficient of frequency (TCF) as well as high velocity of 10,000 m/s and a large electromechanical coupling coefficient of 1.4%. Utilizing this wave, a 2.5 GHz narrow-band SAW filter was successfully fabricated with IDTs of 0.9 µm finger width, which resulted in superior characteristics for a retiming filter with a small insertion loss of 6.7 dB, Q value of 660 and small frequency deviation of 100 ppm in the temperature range from -40 to 85°C. The insertion loss is smaller than any other retiming filters which have ever been reported with quartz, a conventional SAW material, and also the frequency deviation with temperature is smaller than that in the case of ST-cut quartz.