Self-absorption method in combination with an optical probe: a possibility to determine the radial density profile of rare-gas metastables in low-temperature plasmas
Self-absorption method in combination with an optical probe: a possibility to determine the radial density profile of rare-gas metastables in low-temperature plasmas
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DOI：
10.1088/0963-0252/24/3/035023
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发表时间：
2015-06
影响因子：
3.8
通讯作者：
Ximing Zhu;T. Tsankov;U. Czarnetzki
中科院分区：
文献类型：
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作者：
Ximing Zhu;T. Tsankov;U. Czarnetzki
通常采用自吸收法来测定大量低温等离子体中的亚稳态物种密度。在之前的工作中，假设密度分布均匀，该方法仅给出来自等离子体的线积分发射的平均亚稳态密度。相反，这项工作使用浸入等离子体中的光学探针。根据在不同位置测量的发射光谱，可以获得实际的亚稳态密度分布。例如，该技术用于研究压力为 0.1–1 Pa 的感应 Ar 等离子体。Ar(1s5) 和 Ar(1s3)（以 Paschen 符号表示）的空间密度是通过实验确定的，与之前发布的自洽碰撞辐射模型的预测一致。基于这些结果，讨论了将相同的方法应用于其他类型的稀有气体放电。
Usually the self-absorption method is adopted to determine the metastable species density in a large number of low-temperature plasmas. In the previous works this method only gives an average metastable density from the line-integrated emission out of the plasma, assuming a uniform density profile. Instead, this work uses an optical probe immersed in the plasma. From the emission spectra measured at different positions, it is possible to obtain the actual metastable density profile. As an example, this technique is used to investigate an inductive Ar plasma at pressures 0.1–1 Pa. The spatial densities of Ar(1s5) and Ar(1s3) (in Paschen’s notation) are experimentally determined, being in agreement with those predicted by a self-consistent collisional–radiative model published previously. Based on these results, application of the same method to the other kinds of rare-gas discharges is discussed.