A novel AFM-based 5-axis nanoscale machine tool for fabrication of nanostructures on a micro ball.
A novel AFM-based 5-axis nanoscale machine tool for fabrication of nanostructures on a micro ball.
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DOI：
10.1063/1.4994906
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发表时间：
2017-11
期刊：
影响因子：
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通讯作者：
Yanquan Geng;Yuzhang Wang;Yongda Yan;Xuesen Zhao
中科院分区：
文献类型：
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作者：
Yanquan Geng;Yuzhang Wang;Yongda Yan;Xuesen Zhao
提出了一种基于原子力显微镜（AFM）的新型五轴纳米加工机床，用于在微球的不同环上加工纳米结构。结合AFM针尖的划痕轨迹和高精度气浮主轴的运动，可以得到不同的纳米结构。在气浮主轴旋转过程中，使微球的中心与高精度的回转中心重合，保证加工过程的顺利进行。通过控制微球中心与AFM头旋转中心之间的距离，实现了对微球不同圆环的加工。在直径为1500 μm的微球的三个不同圆周上成功地加工出了方形腔、圆形腔、三角形腔和环形纳米通道等纳米结构。此外，还研究了高精度气浮主轴的误差运动以及微球与高精度气浮主轴回转中心的偏心对微球加工位置误差的影响。该加工方法具有制备具有预期尺寸缺陷的惯性约束聚变靶的潜力，这将推进基于AFM针尖的纳米加工方法的应用。
This paper presents a novel atomic force microscopy (AFM)-based 5-axis nanoscale machine tool developed to fabricate nanostructures on different annuli of the micro ball. Different nanostructures can be obtained by combining the scratching trajectory of the AFM tip with the movement of the high precision air-bearing spindle. The center of the micro ball is aligned to be coincided with the gyration center of the high precision to guarantee the machining process during the rotating of the air-bearing spindle. Processing on different annuli of the micro ball is achieved by controlling the distance between the center of the micro ball and the rotation center of the AFM head. Nanostructures including square cavities, circular cavities, triangular cavities, and an annular nanochannel are machined successfully on the three different circumferences of a micro ball with a diameter of 1500 μm. Moreover, the influences of the error motions of the high precision air-bearing spindle and the eccentric between the micro ball and the gyration center of the high precision air-bearing spindle on the processing position error on the micro ball are also investigated. This proposed machining method has the potential to prepare the inertial confinement fusion target with the expected dimension defects, which would advance the application of the AFM tip-based nanomachining approach.