Backside Illumination SPR Generating Structure for Efficient Light Coupling
Backside Illumination SPR Generating Structure for Efficient Light Coupling
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DOI：
10.1109/mems51782.2021.9375207
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发表时间：
2021-01
期刊：
影响因子：
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通讯作者：
T. Kan;Y. Saito;Shinichi Suzuki
中科院分区：
文献类型：
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作者：
T. Kan;Y. Saito;Shinichi Suzuki
在这项研究中，提出了一种有效的背面照明SPR耦合的光栅结构，对小型化SPR传感器的应用。制作了与样品接触的平面嵌入式光栅结构。300 nm厚的SOI顶层被用作采用体微机械加工的SU-8衬底之间的完全可嵌入光栅。RCWA计算证实，该结构具有较高的SPR耦合效率，可以应用于SPR传感器。实验获得的光学响应的制造结构证实，SPR有效耦合是可能的。该技术将有助于制作小型化的单片SPR传感器。
In this study, a grating structure for efficient backside illumination SPR coupling is proposed for application toward miniaturized SPR sensors. An embedded grating structure with a flat surface which is in contact with the sample was fabricated. The 300-nm-thick SOI top layer was utilized as a fully embeddable grating among a SU-8 substrate employing bulk micromachining. RCWA calculations confirm that the proposed structure exhibit high SPR coupling efficiency and can be applied to the SPR sensor. The experimentally obtained optical response of the fabricated structure confirmed that the SPR efficient coupling is possible. This technology will contribute to making a miniaturized one-chip SPR sensor.