A Study of Distortion in Electron Microscope Projection Lenses

A Study of Distortion in Electron Microscope Projection Lenses
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电子显微镜投影镜头畸变的研究

DOI:
10.1063/1.1707732
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发表时间:
1946
影响因子:
3.2
通讯作者:
J. Hillier
J. Hillier
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
J. Hillier

文献摘要

被引文献

相似文献

本文讨论了电子显微镜投影透镜畸变的来源,指出了它对颗粒尺寸分布测量的严重影响。描述了测量失真的方法。通过一阶理论,它被证明是可能的,通过使用两个元件的投影透镜校正失真。可获得的校正程度被证明是令人满意的最实用的目的。本文介绍一种双间隙投影透镜极镜及其畸变校正。
The origin of distortion in electron microscope projection lenses is discussed and the serious nature of its effect on the measurement of particle size distributions is pointed out. Methods of measuring distortion are described. By means of first‐order theory it is shown to be possible to correct distortion by the use of a two element projection lens. The degree of correction obtainable is shown to be satisfactory for most practical purposes. A double gap projection lens polepiece and the correction of distortion obtained with it are described.